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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
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Library Thing
Authors
J. Laconte
D. Flandre
J.-P. Raskin
Subjects
General
Ingénierie
Detectors
Electronics
Gas Flow
Physical Optics
Silicon-On-Insulator Technology
Thin Film Devices
Science
Surfaces (Physics)
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