Silicon nitride, silicon dioxide, and emerging dielectrics 9

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First publish year 2007

Authors

Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics (9th 2007 Chicago, Ill.)

Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics (9th 2007 Chicago, Ill.)

Subjects

Silicon Nitride Dielectric Films Electric Insulators And Insulation Thin Film Devices Congresses Silica Thin Films Silicon Dioxide

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