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Discover Cathode Sputtering (Plating Process)
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Sputtered targets and sputtered films
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Thin film materials technology
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Sputtering targets and sputtered films
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Plasma assisted surface coating/modification processes
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Vacuum technology, thin films, and sputtering
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Reactive Sputter Deposition
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Thin film materials technology
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Pulsed and pulsed bias sputtering
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Volume des comptes-rendus
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IPAT 77
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Thin film materials technology
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Comptes rendus des travaux du CIP G87
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Obrabotka gazovykh podshipnikov s primeneniem ionnogo raspylenii͡a︡
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Handbook of sputter deposition technology
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Sputtering Materials For Vlsi And Thin Film Devices
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