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Discover Masks (Electronics)
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Patterning of material layers in submicron region
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Materials Development for Direct Write Technologies
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Photomask fabrication technology
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Technological advances in micro and submicro photofabrication imagery
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Alternative lithographic technologies II
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Emerging Lithographic Technologies XII
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Photomask and X-Ray Mask Technology III
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16th European Conference on Mask Technology for Integrated Circuits and Microcomponents
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Photomask and X-Ray Mask Technology V
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Technologies for microlithography manufacturing
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Emerging lithographic technologies X
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Proceedings of the Second International Symposium on Electrochemical Microfabrication
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Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing II
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Photomask and next-generation lithography mask technology XI
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Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing V
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Emerging lithographic technologies XI
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Photomask and next-generation lithography mask technology X
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Early emission line stars
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Photomask And Next-generation Lithography Mask Technology XII
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Diazonaphthoquinone-based resists
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Handbook of Photomask Manufacturing Technology
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Photomask and next-generation lithography mask technology IX
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Photomask and Next-Generation Lithography Mask Technology XV
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Selected papers on optical microlithography
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