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Nano-bio-electronic, photonic and MEMS packaging
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Bits on Chips
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Novel on-wafer radiation pattern measurement technique for MEMS actuator based reconfigurable patch antennas
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Novel on-wafer radiation pattern measurement technique for MEMS actuator based reconfigurable patch antennas
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BioNanoFluidic MEMS (MEMS Reference Shelf)
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Introductory MEMS
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Foundations of MEMS
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Photonic Microsystems
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BioMEMS and biomedical nanotechnology
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Optical inspection of microsystems
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Semiconductor Manufacturing Handbook (McGraw-Hill Handbooks)
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MEMS
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