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Discover Microsystèmes Électromécaniques
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Plunkett's nanotechnology & MEMS industry almanac 2009
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Micromechanics And Microactuators Proceedings Of Mamm 2010 Aachen Germany May 2729 2010
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Vlsi Microphotonics
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MEMS and microstructures in aerospace applications
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Microscale and Nanoscale Heat Transfer
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FEM and Micromechatronics with ATILA Software
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Spintronic materials and technology
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Micro mechanical systems
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Introduction to Mechatronics
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The MEMS handbook
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Lab-on-a-chip
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MEMS and NEMS
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MEMS packaging
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Microrobotics
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Integrated microsystems
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MEMS/MOEMS components and their applications V
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MEMS Silicon Oscillating Accelerometers and Readout Circuits
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Adhesion aspects in MEMS-NEMS
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A guide to hands-on MEMS design and prototyping
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Microelectrofluidic systems
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Optical Nano And Micro Actuator Technology
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Handbook of silicon based MEMS
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Optical and Photonic MEMS Devices
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Micro mechanical transducers
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