Discover Titanium Nitride

Advanced metallization and interconnect systems for ULSI applications in 1995

Internal stresses and microstructure of layer/substrate assemblies

Mechanical and physical properties of particulate composites in the system titanium nitride-alumina-aluminum nitride

Vapor-phase reactions to prepare titanium nitride powder

PACVD of TiN

Titanium nitride coatings

Abscheidung metastabiler Ti₁₋xAlxN-Schichten nach dem plasmagestützten CVD-Verfahren

Advanced metallization and interconnect systems for ULSI applications in 1996

Analysis methods and techniques for hard thin layer-coatings characterization